How Thermal Mass Changes the Behavior of a Wafer Heater

https://heater-technology-guide.northstarcolumn.com/posts/kapton-heater-basics-what-engineers-should-know-before-selection

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result